UHV gate valve, manually actuated
メタルシールステンレス製ハウジング
空洞のない加硫済みバルブディスクシール
ベローズシール
潤滑剤不要の機構
フリークリアランスによる高いコンダクタンスを実現
寿命：5万サイクル
Technical Data
| Model | SVV 040 HM, UHV gate valve, manually actuated | SVV 063 HF, UHV gate valve, manually actuated | SVV 100 HF, UHV gate valve, manually actuated | SVV 160 HF, UHV gate valve, manually actuated |
|---|---|---|---|---|
| Actuator | Handwheel | Handwheel | Handwheel | Handwheel |
| Bakeout temperature: Valve closed | 200 °C | 392 °F | 473 K | 200 °C | 392 °F | 473 K | 200 °C | 392 °F | 473 K | 200 °C | 392 °F | 473 K |
| Bakeout temperature: Valve open, under vacuum | 250 °C | 482 °F | 523 K | 250 °C | 482 °F | 523 K | 250 °C | 482 °F | 523 K | 250 °C | 482 °F | 523 K |
| Conductance for molecular flow | 220 l/s | 600 l/s | 1700 l/s | 6000 l/s |
| Differential pressure in closing direction | 2,000 hPa | 1,500 Torr | 2,000 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar |
| Differential pressure in opening direction | 2,000 hPa | 1,500 Torr | 2,000 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar |
| Feedthrough | Bellows | Bellows | Bellows | Bellows |
| Housing | Stainless steel | Stainless steel | Stainless steel | Stainless steel |
| Nominal diameter | DN 40 CF-F | DN 63 CF-F | DN 100 CF-F | DN 160 CF-F |
| Opens to a pressure difference of | 30 hPa | 22.5 Torr | 30 mbar | 30 hPa | 22.5 Torr | 30 mbar | 30 hPa | 22.5 Torr | 30 mbar | 30 hPa | 22.5 Torr | 30 mbar |
| Pressure max. (absolute) | 2,000 hPa | 1,500 Torr | 2,000 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar | 1,600 hPa | 1,200 Torr | 1,600 mbar |
| Pressure min. | 1 · 10-10 hPa | 7.5 · 10-11 Torr | 1 · 10-10 mbar | 1 · 10-10 hPa | 7.5 · 10-11 Torr | 1 · 10-10 mbar | 1 · 10-10 hPa | 7.5 · 10-11 Torr | 1 · 10-10 mbar | 1 · 10-10 hPa | 7.5 · 10-11 Torr | 1 · 10-10 mbar |
| Seal: Housing | Metal | Metal | Metal | Metal |
| Seal: Valve seat | FKM | FKM | FKM | FKM |
| Service life | 50000 cycles | 50000 cycles | 50000 cycles | 50000 cycles |
| Tightness: Housing | 5 · 10-11 Pa m3/s | 3.75 · 10-10 Torr l/s | 5 · 10-10 mbar l/s | 5 · 10-11 Pa m3/s | 3.75 · 10-10 Torr l/s | 5 · 10-10 mbar l/s | 5 · 10-11 Pa m3/s | 3.75 · 10-10 Torr l/s | 5 · 10-10 mbar l/s | 5 · 10-11 Pa m3/s | 3.75 · 10-10 Torr l/s | 5 · 10-10 mbar l/s |
| Tightness: Valve seat | 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s | 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s | 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s | 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s |
| Type | UHV gate valve | UHV gate valve | UHV gate valve | UHV gate valve |
| Valve plate | Stainless steel | Stainless steel | Stainless steel | Stainless steel |
| Weight | 1.8 kg | 3.97 lb | 9 kg | 19.84 lb | 12 kg | 26.46 lb | 18 kg | 39.68 lb |
Dimensions
